VHS, HS, AX DIFFUSION PUMP

Agilent has earned its position as the leading diffusion pump manufacturer in the world by listening to customer needs and by continuously improving the performance and reliability of their benchmark designs. Throughout their more than forty years of leadership in the industry, they have consistently produced pumps that provide the most efficient means of converting heat into pumping throughput.

Agilent’s experience has allowed them to optimize the design of every element of the pump. As a result, Agilent diffusion pumps offer you the lowest cost of ownership available for many high vacuum-pumping applications.

FEATURES AND BENEFITS

Low Cost of Ownership

By providing the highest throughput available per unit of power, reduced cooling water requirements, and rugged, durable construction, Agilent delivers large volume pumping at the lowest total cost to you.

Built for Production Volumes

Agilent’s success is in helping you meet the exacting requirements of your production process. Their pumps deliver superior pumping at high pressure and high gas flow conditions, and handle gas load variations that are typical of large volume production

Robust Boiler Design

Through optimized boiler design, Agilent pumps are stable and reliable under widely varying operating conditions. This temperature stability prolongs fluid life as well. Thermal protection switches prevent system over-temperature conditions.

Options to Address Your Needs

Many applications have unique requirements. Agilent can provide additional features such as Halo or custom baffles to eliminate additional backstreaming, and a Quick Cool Coil option to accelerate system cycle times.

Fully Optimized Jet

Using their long and varied experience, Agilent designs and produces vapor jets that deliver the highest throughput pressure stability, and tolerable foreline pressure available, while reducing backstreaming to a minimum.

Easy to Maintain

Maintaining uptime is critical so we have simplified operation and maintenance. A sight glass provides visual indication of status when cold or hot and under vacuum. A gauge port facilitates system troubleshooting.

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PERFORMANCE:

		AX-65	HS-2	VHS-4	VHS-6	VHS-250	VHS-10	VHS-400	HS-16	HS-20	HS-32	NHS-35
Pumping speed (operating range)	l/s
Air		65	160	750	1550	2125	3650	4,500	6,000	10,000	17,300	28,000
Helium & hydrogen		90	200	940	1930	2660	4560	5,625	7,500	12,500	21,625	35,000
Pumping speed AVS 4.1 (1963)		–	285	1200	2400	3700	5300	8,000	10,000	17,500	32,000	50,000
Maximum forepressure	mbar
No load		1.00	0.72	0.86	0.85	0.85	0.85	0.85	0.85	0.85	0.65	0.71
Full load		0.78	0.52	0.73	0.72	0.72	0.72	0.72	0.72	0.72	0.45	0.52
Maximum throughput	mbar-l/s
In operating range		0.25	0.80	2.0	3.2	3.5	8.4	8.4	11.7	16.7	40	33
@1.3×10-² mbar		0.40	0.93	3.2	4.5	4.5	10.0	10.0	15.3	23.4	45.5	45.5
Minimum recommended backing pump for maximum throughput	m³/hr	0.25	8.5	17	28.9	28.9	51	51	136	170	510	510
Backstreaming rate at inlet flange mg/cm2/min (standard cold cap)	mg/cm2/min	2×10-⁴	1×10-³	5×10-⁴	5×10-⁴	5×10-⁴	5×10-⁴	1×10-³	1×10-³	1×10-³	7×10-⁴	5×10-⁴
Warmup time	Min	7	15	10	10	10	15	15	30	45	60	60
Cooldown time, with quick cool coil, where applicable	Min	10	10	10	10	10	25	25	30	45	60	60
Fluid charge	cc	30	100	300	500	500	1000	1000	2.8 liters	4.7 liters	11.3 liters	11.3 liters
electrical requirements		1 ph, 50/60Hz 90/115/165/220 V	1 ph, 50/60Hz 120/240 V	1 ph, 50/60Hz 120/208/240 V	1 ph, 50/60Hz 120/208/240 V	1 ph, 50/60Hz 120/208/240 V	3 ph 50/60 Hz 208/240/380/480 V	3 ph 50/60 Hz 208/240/380/480 V	3 ph 50/60 Hz 240/415/480 V	3 ph 50/60 Hz 240/415/480 V	3 ph 50/60 Hz 240/415/480 V	3 ph 50/60 Hz 240/415/480 V
Power	Watt	200/250	450	1450	2200	2200	4400	4400	8100/9600	12000	24000	24000
Cooling water at 15-26 °C	l/hr	N/A	20	30	50	50	80	80	300	300	800	800

AX Diffusion Pump

ax-65_web ax-65-a

HS, NHS Diffusion Pump

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VHS Diffusion Pump

vhs-6_1 vhs-10_new9212011_1s vhs-400_3a